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Sencera - Energy at the Speed of Light
 
  Energy at the
           Speed of Light
 
TECHNOLOGY
Sencera’s Approach/Manufacturing Process
Active Plasma inside Sencera’s Viper™ Plasma Enhanced Chemical Vapor Deposition Chamber
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New Photovoltaic Deposited Thin Films Ready for Testing and Characterization
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Sencera develops and manufactures high performance plasma tools capable of depositing thin film coatings on a wide variety of materials. Our sources are designed to produces an intense plasma that is uniform over a distributed length. Sencera also integrates the complete power deliver system into its plasma sources. This approach handles the power from the electrical wall source through DC and Radio Frequency (RF) conversion until it is finally used to produce a plasma. This integrated system reduces machine-to-machine variation and virtually eliminate the tuning time often found at the beginning of a recipe step.
Sencera LPS-48 - Large Area Plasma Source
Sencera’s LPS-48 is a Plasma Enhanced Chemical Vapor Deposition Source, that deposits a variety of thin films at fast rates. Films such silicon, silicon dioxide, silicon nitride, and several transparent conducting oxides (TCO's) have been deposited at rates in excess of 500 angstrom-meters per minute. The LPS-48 exposes the substrate to low temperature (from room temperature to 120 C) and is capable of uniform large area deposits. This facilitates deposition onto new materials such as PET and other non-specialized plastics.
Sencera Viper™ - Large Area Plasma Deposition Platform
Sencera’s Viper™, a large area Plasma Enhanced Chemical Vapor Deposition Platform, is designed to deposit thin films at very high rates. It utilizes Sencera's LPS-48 plasma source and an integrated power supply, in order to maximize throughput. In addition, a proprietary gas dispersion system minimizes ion bombardment resulting in uniform high quality films. The modular Viper™ platform features a distributed control system for easy integration into either batch or roll to roll process applications.
Sencera TPS 3000 - Atmospheric Pressure Plasma Source
Sencera's TPS 3000 is a plasma source designed to operate at atmospheric pressure. It features a unique power system that delivers 3000 Watts to the plasma. The TPS 3000 is compatible with all gas chemistries.
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